Release Time:2019-03-11  Hits:

Indexed by: Conference Paper

Date of Publication: 2016-04-26

Included Journals: Scopus、CPCI-S、EI

Volume: 9685

Key Words: Polymer-based optical splitter; multimode interference; UV-based soft imprint lithography

Abstract: A polymer-based multimode interference (MMI) optical splitter chip has been fabricated through UV-based soft imprint lithography (Soft UV-NIL) technique. Propagation loss and bending loss are considered during the chip design in order to decrease the insertion loss. UV curable fluorinated acrylate resin is used due to its low material absorbing loss. 1x4 cascaded MMI splitter is fabricated and measured at 1550 nm optical wavelength and an average 12.38 dB insertion loss is obtained together with an 1.23 dB uniformity.