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Fabrication of polymer-based multimode interference optical splitters by UV-based soft imprint lithography

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Indexed by:会议论文

Date of Publication:2016-04-26

Included Journals:EI、CPCI-S、Scopus

Volume:9685

Key Words:Polymer-based optical splitter; multimode interference; UV-based soft imprint lithography

Abstract:A polymer-based multimode interference (MMI) optical splitter chip has been fabricated through UV-based soft imprint lithography (Soft UV-NIL) technique. Propagation loss and bending loss are considered during the chip design in order to decrease the insertion loss. UV curable fluorinated acrylate resin is used due to its low material absorbing loss. 1x4 cascaded MMI splitter is fabricated and measured at 1550 nm optical wavelength and an average 12.38 dB insertion loss is obtained together with an 1.23 dB uniformity.

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