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Indexed by:期刊论文

Date of Publication:2012-07-01

Journal:SCRIPTA MATERIALIA

Included Journals:SCIE、EI、Scopus

Volume:67

Issue:2

Page Number:197-200

ISSN No.:1359-6462

Key Words:Nanometer chip; Ultrafine grit; TEM; HgCdTe; Nanogrinding

Abstract:Face nanogrinding was conducted on HgCdTe films using a novel ultrafine diamond wheel that we have developed. Damage-free subsurface was achieved after direct face nanogrinding. Two undeformed nanometer chips with rectangular cross-section were observed. The chip thickness varies from 25 to 28 nm, corresponding to a chip width/thickness ratio ranging from 3.2 to 3.4. A novel model of maximum undeformed chip thickness for face grinding was constructed, and the calculated results are consistent with those found experimentally. (C) 2012 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.