个人信息Personal Information
教授
博士生导师
硕士生导师
性别:男
毕业院校:天津大学
学位:博士
所在单位:机械工程学院
学科:机械制造及其自动化. 机械设计及理论
办公地点:机械工程学院知方楼5055
联系方式:zzy@dlut.edu.cn
电子邮箱:zzy@dlut.edu.cn
Phase transformation of single crystal silicon induced by grinding with ultrafine diamond grits
点击次数:
论文类型:期刊论文
发表时间:2011-01-01
发表刊物:SCRIPTA MATERIALIA
收录刊物:SCIE、EI、Scopus
卷号:64
期号:2
页面范围:177-180
ISSN号:1359-6462
关键字:Transmission electron microscopy (TEM); Semiconductors; Nanocrystalline microstructure; Plastic deformation; Phase transformations
摘要:Phase transformation of single crystal silicon (Si) was investigated under various grinding conditions using high-resolution transmission electron microscopy. Nanocrystals with sizes ranging from 6 to 20 nm of diamond cubic silicon (Si-I) and high-pressure phase (Si-III) were observed in the grinding-induced amorphous Si layers. The phase transformation pattern was found to be influenced by the thermal status involved in the grinding processes. (C) 2010 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.