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论文类型：期刊论文

发表时间：2008-05-15

发表刊物：SURFACE & COATINGS TECHNOLOGY

收录刊物：SCIE、EI

卷号：202

期号：16

页面范围：3897-3902

ISSN号：0257-8972

关键字：unbalanced magnetron sputtering; LaxCeyO1-x-y films; microstructure; tribological properties

摘要：A series of LaxCeyO1-x-y films (x= 0-0.54, y= 0-0.58) with thickness of 35-45 nm was deposited by unbalanced magnetron sputtering. High-resolution transmission electron microscope observation shows that La0.24Ce0.34O0.42 film has polycrystalline structure. La2O3 and CeO2 are formed within the LaxCeyO1-x-y films confirmed by the X-ray diffraction and X-ray photoelectron microscopy The friction coefficient and residual compressive stress of five kinds of three-element compound films exhibit symmetric distribution with the relative equilibrium of La and Ce atomic concentration within the films. The critical load of all deposited films is between 28 and 33 mN. The friction coefficient of two kinds of rare earth complex oxide films is in the range of 0.08-0.09, which is lower than that of only one kind of rare earth oxide films, and the friction mechanism is discussed. (C) 2008 Elsevier B.V. All rights reserved.