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阎军

Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates


Main positions:Deputy director of the Department of Engineering Mechanics
Gender:Male
Alma Mater:Dalian University of Technology
Degree:Doctoral Degree
School/Department:Engineering Mechanics
Discipline:Engineering Mechanics. Computational Mechanics. Solid Mechanics. Aerospace Mechanics and Engineering. Design and Manufacture of Ship and Ocean Structure
Business Address:Room 305, Engineering Mechanics Department Building
Contact Information:0411-84706832
E-Mail:yanjun@dlut.edu.cn
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Current position: Home >> Scientific Research >> Paper Publications

等离子硅刻蚀及其工艺参数的多尺度优化

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Indexed by:期刊论文

Date of Publication:2014-10-31

Journal:计算机辅助工程

Volume:23

Issue:5

Page Number:84-87

ISSN No.:1006-0871

Key Words:硅刻蚀;容性耦合等离子体;射频电压;腔室压强;Kriging模型;优化

Abstract:用CFD-ACE+和CFD-TOPO分别对容性耦合等离子体反应腔室放电和等离子硅刻蚀过程进行仿真,讨论不同射频电压和腔室条件对等离子体特性的影响.结果表明:随着射频电压的升高,离子的通量增大;在低射频电压时,离子通量随腔室压强的升高而减小,而在高射频电压时趋势则相反.用Kriging模型对影响刻蚀形貌的参数(腔室压强和射频电压)进行优化,结果表明该优化方法可以为工艺条件相近的刻蚀机设备的设计提供参考.

 

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