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Stress State of GaN Epilayer Grown on Sapphire and 6H-SiC Substrates

Release Time:2023-03-15  Hits:

Date of Publication: 2022-10-08

Journal: JOURNAL OF TESTING AND EVALUATION

Institution: 微电子学院

Volume: 41

Issue: 5

Page Number: 798-803

ISSN: 0090-3973

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