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Crack-free Al0.5Ga0.5N epilayer grown on SiC substrate by in situ SiNx interlayer

Release Time:2024-12-06  Hits:

Date of Publication: 2022-10-06

Journal: MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Institution: 光电工程与仪器科学学院

Volume: 41

Page Number: 291-296

ISSN: 1369-8001

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