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掺杂氧化镓膜的制备方法及掺杂氧化镓膜

Release Time:2022-10-20  Hits:

First Author: 夏晓川

Disigner of the Invention: 申人升,柳阳,梁红伟,杜国同,胡礼中

Institution: 微电子学院

Application Number: CN103469299A

Authorization Number: CN201310398997.6

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