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Indexed by:期刊论文
Date of Publication:2011-03-01
Journal:Journal of Semiconductors
Included Journals:EI、ISTIC、Scopus
Volume:32
Issue:3
ISSN No.:16744926
Abstract:Solar cells are currently fabricated from a variety of silicon-based materials. Now the major silicon material for solar cells is the scrap of electronic grade silicon (EG-Si). But in the current market it is difficult to secure a steady supply of this material. Therefore, alternative production processes are needed to increase the feedstock. In this paper, EBM is used to purify silicon. MG-Si particles after leaching with an initial purity of 99.88% in mass as starting materials were used. The final purity of the silicon disk obtained after EBM was above 99.995% in mass. This result demonstrates that EBM can effectively remove impurities from silicon. This paper mainly studies the impurity distribution in the silicon disk after EBM. ? 2011 Chinese Institute of Electronics.