Current position: Home >> Scientific Research >> Research Projects

多级粗糙表面的微观接触行为与固液两相流动

Release Time:2016-08-09  Hits:

Leading Scientist: 周平

Institution: 机械工程学院

Project Source: 国务院其他部门

Project Level: Provincial and Ministerial Level

Sub-Class of Project: 特别资助项目

Status: 结题

Supported by: Ministry of Human Resources and Social Security

Nature of Project: 纵向

Project Approval Number: 201104561

Date of Project Approval: 2011-01-01

Scheduled Completion Time: 2012-06-30

Date of Project Initiation: 2011-04-01

Date of Project Completion: 2012-06-30

Prev One:低应力高效平坦化中的跨尺度接触与流动行为研究

Next One:基于多级粗糙表面软弹流润滑模型的ULSI平坦化机理研究