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基于多级粗糙表面软弹流润滑模型的ULSI平坦化机理研究

Release Time:2016-08-09  Hits:

Leading Scientist: 周平

Institution: 机械工程学院

Project Source: 国务院其他部门

Project Level: Provincial and Ministerial Level

Sub-Class of Project: 面上项目

Status: 结题

Supported by: Ministry of Human Resources and Social Security

Nature of Project: 纵向

Project Approval Number: 20100470069

Date of Project Approval: 2010-01-01

Scheduled Completion Time: 2012-12-31

Date of Project Initiation: 2011-01-01

Date of Project Completion: 2012-12-31

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