Near-field microscopy inspection of nano scratch defects on the monocrystalline silicon surface
Release Time:2023-01-19 Hits:
Date of Publication: 2022-10-07
Journal: PRECISION ENGINEERING JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEE
Institution: 机械工程学院
Volume: 56
Page Number: 506-512
ISSN: 0141-6359