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超薄石英片抛光加工胶结固持变形

Release Time:2023-01-19  Hits:

Date of Publication: 2022-10-07

Journal: 光学精密工程

Institution: 机械工程学院

Volume: 27

Issue: 11

Page Number: 2402-2409

ISSN: 1004-924X

Note: 新增回溯数据

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