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A mixed elastohydrodynamic lubrication model for simulation of chemical mechanical polishing with double-layer structure of polishing pad

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Date of Publication:2022-10-04

Journal:INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY

Affiliation of Author(s):机械工程学院

Volume:77

Issue:1-4

Page Number:107-116

ISSN No.:0268-3768

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