A mixed elastohydrodynamic lubrication model for simulation of chemical mechanical polishing with double-layer structure of polishing pad
Release Time:2023-01-19 Hits:
Date of Publication: 2022-10-04
Journal: INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Institution: 机械工程学院
Volume: 77
Issue: 1-4
Page Number: 107-116
ISSN: 0268-3768