Current position: Home >> Scientific Research >> Paper Publications

A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing

Release Time:2023-01-19  Hits:

Date of Publication: 2022-10-04

Journal: INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY

Institution: 机械工程学院

Volume: 69

Issue: 5-8

Page Number: 1009-1016

ISSN: 0268-3768

Prev One:Analytical Elastic Plastic Cutting Model for Predicting Grain Depth-of-Cut in Ultrafine Grinding of Silicon Wafer

Next One:A mixed elastohydrodynamic lubrication model for simulation of chemical mechanical polishing with double-layer structure of polishing pad
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click:Times MOBILE Version
The Founding Time : ..
The Last Update Time : ..

Mobile phone sweep