Polarized laser scattering detection of low-density and micron-scale subsurface cracks in silicon wafer
Release Time:2024-05-09 Hits:
Indexed by: Journal Papers
Document Code: 385147
Date of Publication: 2024-03-10
Journal: PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume: 86
Page Number: 75-81
ISSN: 0141-6359
Key Words: DAMAGE; MECHANISMS; SINGLE-CRYSTAL SILICON