Optimization of grinding process for hard and brittle materials based on damage evolution mechanism
Release Time:2024-05-09 Hits:
Indexed by: Journal Papers
Document Code: 385585
Date of Publication: 2024-03-15
Journal: PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume: 86
Page Number: 376-387
ISSN: 0141-6359
Key Words: DEPTH; FRACTURE-TOUGHNESS; FUSED-SILICA; INDUCED SUBSURFACE DAMAGE; MODEL; OPTICAL-GLASS; STATIC CRACK-GROWTH; SURFACE-ROUGHNESS; WAFER