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原子层制造的研究现状与科学挑战

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Date of Publication:2024-04-23

Journal:中国科学基金

Issue:01

Page Number:99-114

Key Words:原子层制造; 原子层制造工艺与装备; 原子层抛光; 原子层损伤控制; 原子层沉积/刻蚀

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