Release Time:2024-06-13  Hits:

Date of Publication: 2024-05-22

Journal: Journal of Materials Processing Technology

Volume: 328

ISSN: 0924-0136

Key Words: Acceleration; Atomic removal form; Chemical mechanical polishing; Curve fitting; Frequency features; High spatial frequency; High-spatial-frequency roughness; Mechanical; Mechanical action; Molecular dynamics; Power spectral density; Reaction kinetics; Spatial frequency; Surface microtopography; Surface microtopography evolution; Surface roughness; Ultra smooth surface