Current position: Home >> Scientific Research >> Paper Publications

STUDY ON CHEMICAL-MECHANICAL SYNERGIES IN POLISHING OF RUTHENIUM

Release Time:2024-09-03  Hits:

Indexed by: Conference Paper

Document Code: 394413

Date of Publication: 2026-03-17

Journal: CONFERENCE OF SCIENCE & TECHNOLOGY FOR INTEGRATED CIRCUITS, 2024 CSTIC

Next One:The analysis and simulation of fracture behavior of fused quartz under dynamic loading
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click:Times MOBILE Version
The Founding Time : ..
The Last Update Time : ..

Browse on mobile