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A statistical characterization model of the microscale contact state of polishing pads

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Date of Publication:2024-06-25

Journal:Journal of Physics: Conference Series

Volume:2557

Issue:1

ISSN No.:1742-6588

Pre One:Study on Chemical-Mechanical Synergies in Polishing of Ruthenium

Next One:Material removal characteristics of metal-polymer composites in the cutting process
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