Modeling of surface microtopography evolution in chemical mechanical polishing considering chemical-mechanical synergy
Release Time:2025-11-17 Hits:
Date of Publication: 2025-10-25
Journal: Tribology International
Page Number: 110206-110206
ISSN: 0301-679X
Key Words: Chemical mechanical polishing; Chemical-mechanical synergy; Numerical simulation; Power spectral density; Surface microtopography