Current position: Home >> Scientific Research >> Paper Publications

聚氨酯抛光垫特性对化学机械抛光性能的影响研究进展(特邀)

Release Time:2025-11-17  Hits:

Date of Publication: 2025-10-25

Journal: Infrared and Laser Engineering

Volume: 54

Issue: 9

ISSN: 1007-2276

Prev One:Modeling of surface microtopography evolution in chemical mechanical polishing considering chemical-mechanical synergy

Next One:Effect of Viscoelastic Characteristics on the Real Contact Area of Polishing Pad Surface
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click:Times MOBILE Version
The Founding Time : ..
The Last Update Time : ..

Mobile phone sweep