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Effect of Viscoelastic Characteristics on the Real Contact Area of Polishing Pad Surface

Release Time:2024-05-09  Hits:

Journal: ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY

Volume: 13

Issue: 4

ISSN: 2162-8769

Key Words: BEHAVIOR; CMP; IMPACT; MATERIAL REMOVAL; MICRO-TEXTURE; MODEL; PERFORMANCE; SILICA

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