Effect of Viscoelastic Characteristics on the Real Contact Area of Polishing Pad Surface
Release Time:2024-05-09 Hits:
Indexed by: Journal Papers
Document Code: 390370
Date of Publication: 2024-04-01
Journal: ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
Volume: 13
Issue: 4
ISSN: 2162-8769
Key Words: BEHAVIOR; CMP; IMPACT; MATERIAL REMOVAL; MICRO-TEXTURE; MODEL; PERFORMANCE; SILICA