location： Current position: Home >> Scientific Research >> Paper Publications

A mixed elastohydrodynamic lubrication model for simulation of chemical mechanical polishing with double-layer structure of polishing pad

Hits:

Indexed by:Journal Papers

Date of Publication:2015-01-01

Journal:Int J Adv Manuf Technol

Included Journals:SCI、EI

Volume:77

Page Number:107-116

Attachments:

2015-A mixed elastohydrodynamic lubrication model for simulation of chemical mechanical polishing with double-layer structure of polishing pad.pdf

Pre One:粗糙薄层弹性体接触刚度分析

Next One:粗糙薄层弹性体接触刚度分析
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep