A mixed elastohydrodynamic lubrication model for simulation of chemical mechanical polishing with double-layer structure of polishing pad
Release Time:2016-10-27 Hits:
Indexed by: Journal Papers
Date of Publication: 2015-01-01
Journal: Int J Adv Manuf Technol
Included Journals: EI、SCI
Volume: 77
Page Number: 107-116