Release Time:2022-10-19 Hits:
First Author: WU Chengwei
Disigner of the Invention: 林鹏,Zhou Ping,GJ MA
Institution: 运载工程与力学学部
Application Number: CN101477586
Authorization Number: CN200910010131.7
Prev One:一种含有多孔结构的CMP抛光垫修整器
Next One:一种低刚度高精度平面镜的工件旋转法磨削装置及方法