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一种含有多孔结构的CMP抛光垫修整器

Release Time:2022-10-19  Hits:

First Author: Renke Kang

Disigner of the Invention: Dong Zhigang,段佳冬,Zhou Ping,zhuxianglong

Institution: 机械工程学院

Application Number: CN106041741A

Authorization Number: CN201610451507.8

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