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300nm超薄晶圆减薄抛光一体机研发与产业化

Release Time:2016-08-09  Hits:

Leading Scientist: Dong Zhigang

Project Source: 科技部重大专项

Status: 结题

Nature of Project: 纵向

Project Approval Number: 2014ZX02504

Date of Project Approval: 2014-01-01

Scheduled Completion Time: 2016-12-30

Date of Project Initiation: 2014-01-01

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