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300nm超薄晶圆减薄抛光一体机研发与产业化

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Leading Scientist:Dong Zhigang

Supported by:科技部重大专项

Status:结题

Nature of Project:纵向

Project Approval Number:2014ZX02504

Date of Project Approval:2014-01-01

Scheduled completion time:2016-12-30

Date of Project Initiation:2014-01-01

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