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基于室温离子液体的高硬晶体基片化学机械抛光新方法

Release Time:2016-08-09  Hits:

Leading Scientist: Dong Zhigang

Project Participants: Renke Kang

Project Source: 国家自然科学基金项目

Sub-Class of Project: 面上项目

Status: 结题

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 51575085

Date of Project Approval: 2015-08-18

Scheduled Completion Time: 2019-12-31

Date of Project Initiation: 2016-01-01

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