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基于室温离子液体的高硬晶体基片化学机械抛光新方法

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Leading Scientist:Dong Zhigang

Project Participants:Renke Kang

Supported by:国家自然科学基金项目

Sub-Class of Project:面上项目

Status:结题

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:51575085

Date of Project Approval:2015-08-18

Scheduled completion time:2019-12-31

Date of Project Initiation:2016-01-01

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