教授 博士生导师 硕士生导师
性别: 男
毕业院校: 北京邮电大学
学位: 博士
所在单位: 控制科学与工程学院
学科: 微电子学与固体电子学. 光学工程
电子邮箱: huihuang@dlut.edu.cn
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论文类型: 期刊论文
发表时间: 2016-12-01
发表刊物: CRYSTAL RESEARCH AND TECHNOLOGY
收录刊物: SCIE、EI、Scopus
卷号: 51
期号: 12
页面范围: 757-761
ISSN号: 0232-1300
关键字: Au; Ni catalyst; GaN; nanowires; V; III flow ratio
摘要: GaN nanowires (NWs) were grown on GaN(0001) coated sapphire substrate with Ni/Au catalyst by using metalorganic chemical vapor deposition. Nucleation conditions were investigated for improving the growth orientation of NWs. With decreasing catalyst thickness from 5nm/5nm to 2nm/2nm, the NW orientation was improved and the NW morphology was changed from taper to cylindrical, due to the varying of growth mode. Vertical alignment of NWs can be further improved by inserting an additional high-temperature (850 ?) nucleation step with an optimum V/III flow ratio of 20.