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基于聚焦激波的微结构非接触式激励方法研究

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Date of Publication:2024-05-21

Journal:传感器与微系统

Volume:43

Issue:04

Page Number:41-44

ISSN No.:2096-2436

Key Words:MEMS微结构; 动态特性测试; 聚焦激波; 非接触式激励

CN No.:23-1537/TN

Pre One:压电陶瓷驱动的MEMS微结构底座激励方法研究

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