Release Time:2024-07-15  Hits:

Date of Publication: 2024-05-21

Journal: 传感器与微系统

Volume: 43

Issue: 04

Page Number: 41-44

ISSN: 2096-2436

Key Words: MEMS微结构; 动态特性测试; 聚焦激波; 非接触式激励

CN: 23-1537/TN