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压电陶瓷驱动的MEMS微结构底座激励方法研究

Release Time:2024-07-15  Hits:

Date of Publication: 2024-05-18

Journal: 机械设计与制造

Issue: 03

Page Number: 31-34

ISSN: 1001-3997

Key Words: 动态特性测试; 压电陶瓷; 底座结构; 激励方法

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