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压电陶瓷驱动的MEMS微结构底座激励方法研究

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Date of Publication:2024-05-18

Journal:机械设计与制造

Issue:03

Page Number:31-34

ISSN No.:1001-3997

Key Words:动态特性测试; 压电陶瓷; 底座结构; 激励方法

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