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射频容性耦合等离子体放电中电非对称效应机理的研究

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Leading Scientist:Zhang YuRu

Project Participants:Fei Gao

Supported by:国家自然科学基金项目

Sub-Class of Project:青年科学基金项目

Status:结题

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:11405019

Date of Project Approval:2014-09-25

Scheduled completion time:2017-12-31

Date of Project Initiation:2015-01-01

Date of Project Completion:2017-12-31

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