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射频容性耦合等离子体放电中电非对称效应机理的研究

Release Time:2016-09-06  Hits:

Leading Scientist: 张钰如

Project Participants: Fei Gao

Project Source: 国家自然科学基金项目

Sub-Class of Project: 青年科学基金项目

Status: 结题

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 11405019

Date of Project Approval: 2014-09-25

Scheduled Completion Time: 2017-12-31

Date of Project Initiation: 2015-01-01

Date of Project Completion: 2017-12-31

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