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张钰如
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Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates
Paper Publications
[1]zhaomingliang, 邢思雨, 唐雯, Zhang YuRu, Fei Gao, wangyounian.面向半导体工艺的平面线圈感性耦合氩等离子体源的三维流体模拟研究[J],物理学报,2024
[2]王鹏宇, 邢思雨, Han, Daoman, Zhang YuRu, Li, Yong, Zhou, Cheng, Fei Gao, wangyounian.Effects of external parameters on plasma characteristics and uniformity in a dual cylindrical ind...[J],PLASMA SCIENCE & TECHNOLOGY,2024,26(12)
[3]李京泽, zhaomingliang, Zhang YuRu, Fei Gao, wangyounian.Fast simulation strategy for capacitively-coupled plasmas based on fluid model[J],Computer Physics Communications,2024,307
[4]YongXin Liu, Kai Zhao, 温德奇, 刘刚虎, 李宏, Fei Gao, Zhang YuRu, SONG Yuan-Hong, wangyounian.低气压射频等离子体研究进展[A],第十八届全国等离子体科学技术会议,2022,1
[5]zhaoshuxia, Zhang YuRu, Fei Gao, wangyounian, Bogaerts, Annemie.Bulk plasma fragmentation in a C4F8 inductively coupled plasma: A hybrid modeling study[J],JOURNAL OF APPLIED PHYSICS,2022,117(24)
[6]Bogaerts, Annemie, Zhang Quanzhi, Zhang YuRu, Van Laer, Koen, Wang, Weizong.Burning questions of plasma catalysis: Answers by modeling[J],CATALYSIS TODAY,2022,337(,SI):3-14
[7]Zhang YuRu, Van Laer, Koen, Neyts, Erik C., Bogaerts, Annemie.Can plasma be formed in catalyst pores? A modeling investigation[J],APPLIED CATALYSIS B ENVIRONMENTAL,2022,185:56-67
[8]Fei Gao, liuwei, zhaoshuxia, Zhang YuRu, sunzhangsen, wangyounian.Changes of the electron dynamics in hydrogen inductively coupled plasma[J],Chinese Physics B,2022,22(11)
[9]毕振华, xuxiang, Zhang YuRu, wangyounian.CCP射频放电流体模型面向加工工艺的仿真应用[A],第十五届全国等离子体科学技术会议,2022,161-161
[10]Fei Gao, Lv, Xiang-Yun, Zhang YuRu, wangyounian.Complex transients of input power and electron density in pulsed inductively coupled discharges[J],JOURNAL OF APPLIED PHYSICS,2022,126(9)
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