Bulk plasma fragmentation in a C4F8 inductively coupled plasma: A hybrid modeling study
Release Time:2024-10-10 Hits:
Date of Publication: 2022-10-05
Journal: JOURNAL OF APPLIED PHYSICS
Institution: 物理学院
Volume: 117
Issue: 24
ISSN: 0021-8979
Release Time:2024-10-10 Hits:
Date of Publication: 2022-10-05
Journal: JOURNAL OF APPLIED PHYSICS
Institution: 物理学院
Volume: 117
Issue: 24
ISSN: 0021-8979