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Scientific Research
张钰如
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Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates
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YongXin Liu, Kai Zhao, 温德奇, 刘刚虎, 李宏, Fei Gao, Zhang YuRu, SONG Yuan-Hong, wangyounian.低气压射频等离子体研究进展[A],第十八届全国等离子体科学技术会议,2022,1
zhaoshuxia, Zhang YuRu, Fei Gao, wangyounian, Bogaerts, Annemie.Bulk plasma fragmentation in a C4F8 inductively coupled plasma: A hybrid modeling study[J],JOURNAL OF APPLIED PHYSICS,2022,117(24)
Bogaerts, Annemie, zhangquanzhi, Zhang YuRu, Van Laer, Koen, Wang, Weizong.Burning questions of plasma catalysis: Answers by modeling[J],CATALYSIS TODAY,2022,337(,SI):3-14
Zhang YuRu, Van Laer, Koen, Neyts, Erik C., Bogaerts, Annemie.Can plasma be formed in catalyst pores? A modeling investigation[J],APPLIED CATALYSIS B ENVIRONMENTAL,2022,185:56-67
Fei Gao, liuwei, zhaoshuxia, Zhang YuRu, sunzhangsen, wangyounian.Changes of the electron dynamics in hydrogen inductively coupled plasma[J],Chinese Physics B,2022,22(11)
毕振华, xuxiang, Zhang YuRu, wangyounian.CCP射频放电流体模型面向加工工艺的仿真应用[A],第十五届全国等离子体科学技术会议,2022,161-161
Patents
一种等离子体放电过程模拟方法及系统
Published Books
数学物理方法
数学物理方法
数学物理方法
数学物理方法
Research Projects
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大功率感性耦合等离子体发生器技术, 事业单位委托科技项目, 2024/07/18, 在研
等离子体测试诊断及仿真, 自选课题, 2023/11/29, 在研
线形RPS 等离子体仿真, 自选课题, 2023/12/20, 在研
面向PECVD非晶硅镀膜装备的等离子体数值模拟研发项目, 企事业单位委托科技项目, 2022/11/01, 在研
等离子体实验诊断与数值仿真技术服务合同, 企事业单位委托科技项目, 2022/08/02, 在研
面向高深宽比刻蚀工艺的超低频容性耦合等离子体源的特性研究, 国家自然科学基金项目, 2022/09/08, 在研