Personal Information
Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates
Scientific Research
Research Field
No Content
Paper Publications
More>>
- 赵明亮.张钰如,Fei Gao,王友年.邢思雨,唐雯.面向半导体工艺的平面线圈感性耦合氩等离子体源的三维流体模拟研究[J],物理学报,2024
- 王鹏宇.Han, Daoman,张钰如,Li, Yong,Zhou, Cheng,Fei Gao,王友年.邢思雨.Effects of external parameters on plasma characteristics and uniformity in a dual cylindrical inductively coupled plasma[J],PLASMA SCIENCE & TECHNOLOGY,2024,26(12)
- 李京泽.赵明亮,张钰如,Fei Gao,王友年.Fast simulation strategy for capacitively-coupled plasmas based on fluid model[J],Computer Physics Communications,2024,307
- YongXin Liu.Kai Zhao,温德奇,刘刚虎,李宏,Fei Gao,张钰如,SONG Yuan-Hong,王友年.低气压射频等离子体研究进展[A],第十八届全国等离子体科学技术会议,2022:1
- 赵书霞.张钰如,Fei Gao,王友年,Bogaerts, Annemie.Bulk plasma fragmentation in a C4F8 inductively coupled plasma: A hybrid modeling study[J],JOURNAL OF APPLIED PHYSICS,2022,117(24)
- Bogaerts, Annemie.张权治,张钰如,Van Laer, Koen,Wang, Weizong.Burning questions of plasma catalysis: Answers by modeling[J],CATALYSIS TODAY,2022,337(,SI):3-14
Patents
More>>
Published Books
More>>
Research Projects
More>>