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张钰如

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Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates

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zhaomingliang, 邢思雨, 唐雯, Zhang YuRu, Fei Gao, wangyounian.面向半导体工艺的平面线圈感性耦合氩等离子体源的三维流体模拟研究[J],物理学报,2024
王鹏宇, 邢思雨, Han, Daoman, Zhang YuRu, Li, Yong, Zhou, Cheng, Fei Gao, wangyounian.Effects of external parameters on plasma characteristics and uniformity in a dual cylindrical inductively coupled plasma[J],PLASMA SCIENCE & TECHNOLOGY,2024,26(12)
李京泽, zhaomingliang, Zhang YuRu, Fei Gao, wangyounian.Fast simulation strategy for capacitively-coupled plasmas based on fluid model[J],Computer Physics Communications,2024,307
YongXin Liu, Kai Zhao, 温德奇, 刘刚虎, 李宏, Fei Gao, Zhang YuRu, SONG Yuan-Hong, wangyounian.低气压射频等离子体研究进展[A],第十八届全国等离子体科学技术会议,2022,1
zhaoshuxia, Zhang YuRu, Fei Gao, wangyounian, Bogaerts, Annemie.Bulk plasma fragmentation in a C4F8 inductively coupled plasma: A hybrid modeling study[J],JOURNAL OF APPLIED PHYSICS,2022,117(24)
Bogaerts, Annemie, Zhang Quanzhi, Zhang YuRu, Van Laer, Koen, Wang, Weizong.Burning questions of plasma catalysis: Answers by modeling[J],CATALYSIS TODAY,2022,337(,SI):3-14

一种等离子体放电过程模拟方法及系统

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