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大功率感性耦合等离子体发生器技术

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Leading Scientist:张钰如

Project Participants:Fei Gao

Supported by:事业单位委托科技项目

Status:在研

Supported by:北京控制工程研究所

Nature of Project:横向

Date of Project Approval:2024-07-18

Scheduled completion time:2025-08-18

Date of Project Initiation:2024-07-18

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