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大功率感性耦合等离子体发生器技术

Release Time:2024-07-18  Hits:

Leading Scientist: 张钰如

Project Participants: Fei Gao

Project Source: 事业单位委托科技项目

Status: 在研

Supported by: Beijing Institute of Control Engineering

Nature of Project: 横向

Date of Project Approval: 2024-07-18

Scheduled Completion Time: 2025-08-18

Date of Project Initiation: 2024-07-18

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