Release Time:2023-11-29  Hits:

Leading Scientist: 张钰如

Project Participants: 王友年,Fei Gao

Project Source: 自选课题

Status: 在研

Supported by: Tuo Jing Chuangyi (Shenyang) Semiconductor Equipment Co., Ltd.

Nature of Project: 横向

Date of Project Approval: 2023-11-29

Scheduled Completion Time: 2024-12-30

Date of Project Initiation: 2023-11-21