Hits:
Leading Scientist:张钰如
Project Participants:wangyounian,Fei Gao
Supported by:自选课题
Status:在研
Supported by:拓荆创益（沈阳）半导体设备有限公司
Nature of Project:横向
Date of Project Approval:2023-11-29
Scheduled completion time:2024-12-30
Date of Project Initiation:2023-11-21
