Hits:
Leading Scientist:张钰如
Project Participants:wangyounian,Fei Gao
Supported by:自选课题
Status:在研
Supported by:季华实验室
Nature of Project:横向
Date of Project Approval:2023-12-20
Scheduled completion time:2024-03-30
Date of Project Initiation:2023-12-08
Pre One:等离子体测试诊断及仿真
Next One:面向PECVD非晶硅镀膜装备的等离子体数值模拟研发项目
