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面向PECVD非晶硅镀膜装备的等离子体数值模拟研发项目

Release Time:2022-12-19  Hits:

Leading Scientist: 宋远红

Project Participants: 张莹莹,张钰如,王友年

Project Source: 企事业单位委托科技项目

Status: 在研

Supported by: Suzhou Maxon Technology Co., Ltd.

Nature of Project: 横向

Date of Project Approval: 2022-11-01

Scheduled Completion Time: 2025-10-31

Date of Project Initiation: 2022-11-01

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