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面向PECVD非晶硅镀膜装备的等离子体数值模拟研发项目

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Leading Scientist:宋远红

Project Participants:zhangyingying,Zhang YuRu,wangyounian

Supported by:企事业单位委托科技项目

Status:在研

Supported by:苏州迈为科技股份有限公司

Nature of Project:横向

Date of Project Approval:2022-11-01

Scheduled completion time:2025-10-31

Date of Project Initiation:2022-11-01

Date of Project Completion:2025-10-31

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