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Fast simulation strategy for capacitively-coupled plasmas based on fluid model

Release Time:2025-09-15  Hits:

Date of Publication: 2024-11-05

Journal: Computer Physics Communications

Volume: 307

ISSN: 0010-4655

Key Words: Acceleration method; Capacitively coupled plasmas; Computational fluid dynamics; Electron fluid; Fast simulation; Fluid equations; Fluid modeling; Fluid simulations; Multi-time step; Performance; Up-wind scheme

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