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Effects of external parameters on plasma characteristics and uniformity in a dual cylindrical inductively coupled plasma

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Date of Publication:2024-11-12

Journal:PLASMA SCIENCE & TECHNOLOGY

Volume:26

Issue:12

ISSN No.:1009-0630

Key Words:AR; ARGON; AR/O-2; DENSITY; ION FLUX; MODEL; O-2; OXYGEN; REMOTE PLASMA

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