Effects of external parameters on plasma characteristics and uniformity in a dual cylindrical inductively coupled plasma
Release Time:2025-09-15 Hits:
Indexed by: Journal Papers
Document Code: 403512
Date of Publication: 2024-12-01
Journal: PLASMA SCIENCE & TECHNOLOGY
Volume: 26
Issue: 12
ISSN: 1009-0630
Key Words: AR; ARGON; AR/O-2; DENSITY; ION FLUX; MODEL; O-2; OXYGEN; REMOTE PLASMA