面向半导体工艺的平面线圈感性耦合氩等离子体源的三维流体模拟研究
Release Time:2025-09-15 Hits:
Indexed by: Journal Papers
Document Code: 411646
Date of Publication: 2024-11-15
Journal: 物理学报
Volume: 73
Issue: 21
Page Number: 130-139
ISSN: 1000-3290
Key Words: 三维流体模拟; 感性耦合等离子体; 等离子体均匀性; 线圈形状
CN: 11-1958/O4