面向半导体工艺的平面线圈感性耦合氩等离子体源的三维流体模拟研究
Release Time:2025-09-15 Hits:
Date of Publication: 2024-11-15
Journal: 物理学报
ISSN: 1000-3290
Key Words: coil structure; Inductively coupled plasma; plasma uniformity; Three-dimensional fluid simulation
CN: 11-1958/O4
Release Time:2025-09-15 Hits:
Date of Publication: 2024-11-15
Journal: 物理学报
ISSN: 1000-3290
Key Words: coil structure; Inductively coupled plasma; plasma uniformity; Three-dimensional fluid simulation
CN: 11-1958/O4