Three-dimensional fluid simulation of a planar coil inductively coupled argon plasma source for semiconductor processes
Release Time:2025-09-15 Hits:
Indexed by: Journal Papers
Document Code: 411646
Date of Publication: 2024-11-05
Journal: ACTA PHYSICA SINICA
Volume: 73
Issue: 21
ISSN: 1000-3290
CN: 11-1958/O4