Complex transients of input power and electron density in pulsed inductively coupled discharges
Release Time:2024-10-10 Hits:
Date of Publication: 2022-10-05
Journal: JOURNAL OF APPLIED PHYSICS
Institution: 物理学院
Volume: 126
Issue: 9
ISSN: 0021-8979
Release Time:2024-10-10 Hits:
Date of Publication: 2022-10-05
Journal: JOURNAL OF APPLIED PHYSICS
Institution: 物理学院
Volume: 126
Issue: 9
ISSN: 0021-8979