LLqoJ4juefLjaSKLxfyPWtXOcK3xn4HmyIRuEenxf3f8TyHuRny8H4wIcAvT
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Changes of the electron dynamics in hydrogen inductively coupled plasma

Release Time:2024-10-10  Hits:

Date of Publication: 2022-10-05

Journal: Chinese Physics B

Institution: 物理学院

Volume: 22

Issue: 11

ISSN: 1674-1056

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