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感应耦合等离子源仿真模拟合作研究

Release Time:2017-06-11  Hits:

Leading Scientist: 张钰如

Project Participants: 王友年

Project Source: 企事业单位委托科技项目

Status: 结题

Supported by: Beijing North China Star Micro-Electronic Equipment Co., Ltd.

Nature of Project: 横向

Date of Project Approval: 2017-04-27

Scheduled Completion Time: 2017-06-20

Date of Project Initiation: 2017-04-27

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