Hits:
Leading Scientist:Zhang YuRu
Project Participants:wangyounian
Supported by:企事业单位委托科技项目
Status:结题
Supported by:北京北方华创微电子装备有限公司
Nature of Project:横向
Date of Project Approval:2017-04-27
Scheduled completion time:2017-06-20
Date of Project Initiation:2017-04-27
