Current position: Home >> Scientific Research >> Paper Publications

Simulations of standing wave effect, stop band effect, and skin effect in large-area very high frequency symmetric capacitive discharges

Release Time:2022-01-05  Hits:

Indexed by: Journal Article

Date of Publication: 2021-12-18

Journal: Plasma Sci. Technol.

Volume: 23

Page Number: 35401-

Prev One:Numerical investigation of radio-frequency negative hydrogen ion sources by a three-dimensional fluid model

Next One:Hybrid simulation of radio frequency biased inductively coupled Cl2 plasmas