location： Current position: Home >> Scientific Research >> Paper Publications

Experimental and numerical investigations on time-resolved characteristics of pulsed inductively coupled O2/Ar plasmas

Hits:

Date of Publication:2017-01-01

Journal:JOURNAL OF VACUUM SCIENCE TECHNOLOGY A

Affiliation of Author(s):物理学院

Volume:35

Issue:2

Page Number:21301-21301

Pre One:Effect of phase angle on plasma characteristics in electrically asymmetric capacitive discharge

Next One:常压等离子体对柔性多孔材料表面处理均匀性的研究进展
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep