Current position: Home >> Scientific Research >> Paper Publications

Simulations of standing wave effect, stop band effect, and skin effect in large-area very high frequency symmetric capacitive discharges

Release Time:2023-05-05  Hits:

Date of Publication: 2022-10-08

Journal: PLASMA SCIENCE & TECHNOLOGY

Volume: 23

Issue: 3

ISSN: 1009-0630

Key Words: "electromagnetic effects; hybrid model; plasma uniformity"

Prev One:Simulations of electromagnetic effects in large-area high-frequency capacitively coupled plasmas with symmetric electrodes: Different axial plasma density profiles

Next One:Spatial distributions of plasma parameters in inductively coupled hydrogen discharges with an expansion region
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click:Times MOBILE Version
The Founding Time : ..
The Last Update Time : ..

Mobile phone sweep