location： Current position: Home >> Scientific Research >> Paper Publications

Secondary electron effect on sustaining capacitively coupled discharges: A hybrid modeling investigation of the ionization rate

Hits:

Date of Publication:2022-10-08

Journal:AIP Advances

Volume:9

Issue:5

ISSN No.:2158-3226

Pre One:Plasma characteristics in an electrically asymmetric capacitive discharge sustained by multiple harmonics: operating in the very high frequency regime

Next One:Simulations of electromagnetic effects in large-area high-frequency capacitively coupled plasmas with symmetric electrodes: Different axial plasma density profiles
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep